Virtual metrology - Alchetron, The Free Social Encyclopedia

In semiconductor manufacturing, virtual metrology refers to methods to predict properties of a wafer based on machine parameters and sensor data of the production equipment, without performing the (costly) physical measurement of the wafer properties. Statistical methods such as classification and regression are used to perform such a task.

Example of virtual metrology are:

the prediction of the silicon nitride ( S i 3 N 4 ) layer thickness in the chemical vapor deposition process (CVD), using multivariate regression methods;

the prediction of critical dimension in photolithography, using multi-level and regularization approaches;

the prediction of layer width in etching.

References

Virtual metrology Wikipedia

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