Formula Ga(C2H5)3 Boiling point 143 °C Pubchem 66198 | Molar mass 156.9 g/mol Appearance clear colourless liquid ChemSpider ID 59583 | |
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Melting point −82.3 °C (−116.1 °F; 190.8 K) | ||
Triethylgallium, Ga(C2H5)3, or TEGa, is a metalorganic source of gallium for metalorganic vapour phase epitaxy (MOVPE) of compound semiconductors.
Contents
Properties
TEGa is a clear, colorless, pyrophoric liquid and should be handled with caution.
Applications
TEGa can be a useful alternative to trimethylgallium in the metalorganic vapour phase epitaxy of compound semiconductors because films grown using TEGa have been shown to have a lower carbon impurity concentration.
References
Triethylgallium Wikipedia(Text) CC BY-SA