Tungsten(III) oxide

Tungsten(III) oxide (W₂O₃) is a compound of tungsten and oxygen. It has been reported (2006) as being grown as a thin film by atomic layer deposition at temperatures between 140 and 240 °C using W₂(N(CH₃)₂)₆ as a precursor. It is not referred to in major textbooks. Some older literature refers to the compound W₂O₃ but as the atomic weight of tungsten was believed at the time to be 92, i.e., approximately half the modern accepted value of 183.84, the compound actually being referred to was WO₃.