Molar mass 153.43 g/mol ChemSpider ID 123347 | Pubchem 139862 | |
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Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.
References
Trichlorofluorosilane Wikipedia(Text) CC BY-SA