Stress Induced Leakage Current (SILC) is an increase in the gate leakage current of a MOSFET, due to defects created in the gate oxide during electrical stressing. SILC is perhaps the largest factor inhibiting device miniaturization. Increased leakage is a common failure mode of electronic devices.
Oxide defects
The most well-studied defects assisting in the leakage current are those produced by charge trapping in the oxide. This model provides a point of attack and has stimulated researchers to develop methods to decrease the rate of charge trapping by mechanisms such as nitrous oxide (N2O) nitridation of the oxide.
References
SILC (semiconductors) Wikipedia(Text) CC BY-SA