Harman Patil (Editor)

Plasma processing

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Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.

Plasma processing techniques include:

  • Plasma activation
  • Plasma etching
  • Plasma modification
  • Corona treatment
  • Plasma functionalization
  • Plasma polymerization
  • Plasma cleaning
  • Plasma electrolytic oxidation
  • Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputter deposition, plasma iondoping, vacuum plasmaspraying, and reactive ion etching.

    References

    Plasma processing Wikipedia


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