Perfluorodecyltrichlorosilane

Perfluorodecyltrichlorosilane, also known as FDTS, is a colorless liquid chemical with molecular formula C₁₀H₄Cl₃F₁₇Si. FDTS molecules form self-assembled monolayers. They bond onto surfaces terminated with hydroxyl (-OH) groups, such as glass, ceramics, or SiO₂ forming a regular covalent bond. It anchors on oxide surfaces with its tricholoro-silane group and attaches covalently.

Due to its heavily fluorinated tail group, a FDTS monolayer reduces surface energy. Deposition of a FDTS monolayer is achieved by a relatively simple process, also known as molecular vapor deposition (MVD) It usually deposits from a vapor phase, at room to near-to-room temperatures (50 °C) and is thus compatible with most substrates. The process is usually carried out in a vacuum chamber and assisted by the presence of water vapor. Treated surfaces have water repellent and friction reducing properties.

For this reason, a FDTS monolayer is often applied to movable microparts of microelectromechanical systems (MEMS). A FDTS monolayer reduces surface energy and prevents sticking, so they are used to coat micro- and nano-features on stamps for a nanoimprint lithography which is becoming a method of choice for making electronics, organic photodiodes, microfluidics and other.

Reduced surface energy is helpful for reduction of ejection force and demolding of polymer parts in an injection molding and FDTS coating was applied onto some metallic injection molding molds and inserts.