Pentafluoride may refer to:
Antimony pentafluoride, SbF5
Arsenic pentafluoride, AsF5
Bismuth pentafluoride, BiF5
Bromine pentafluoride, BrF5
Chlorine pentafluoride, ClF5
Chromium pentafluoride, CrF5
Gold pentafluoride, Au2F10
Iodine pentafluoride, IF5
Iridium pentafluoride, IrF5
Niobium pentafluoride, NbF5
Nitrogen pentafluoride, NF5
Phosphorus pentafluoride, PF5
Platinum pentafluoride, PtF5
Ruthenium pentafluoride, RuF5
Tantalum pentafluoride, TaF5
Uranium pentafluoride, UF5
