Octadecyltrichlorosilane

Octadecyltrichlorosilane (ODTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH₃(CH₂)₁₇SiCl₃. It is flammable, reacts with water, and is also sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.

Octadecyltrichlorosilane is an amphiphilic molecule consisting of a long-chain alkyl group (C₁₈H₃₇–) and a polar head group (SiCl₃–), which forms Self assembled monolayers (SAMs) on various oxidic substrates.

ODTS finds its use in molecular electronics, as thin insulating gates in Metal-Insulator-Semiconductor Field-Effect Transistors.

Dodecyltrichlorosilane, an ODTS analog with shorter alkyl chain, is used for the same purpose as well.

ODTS-PVP films are used in organic-substrate LCD displays.