A nanoelectromechanical systems mass spectrometer (NEMS MS) is an instrument measuring the mass of analyte particles by detecting the frequency shift caused by the adsorption of the particles on a NEMS resonator.
It was first reported by a group of scientists led by Michael Roukes at the California Institute of Technology in 2004. They developed single molecule analysis in 2009. Single-biomolecule mass measurements were accomplished in 2012. A hybrid NEMS-MS/TOF-MS instrument was reported in 2015.
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Nanoelectromechanical systems mass spectrometer Wikipedia(Text) CC BY-SA