Language English Publisher IEEE Computer Society | Edited by Anthony Muscat Publication history 1988–present | |
Abbreviated title (ISO 4) IEEE Trans. Semicond. Manuf. Discipline Semiconductor device fabrication | ||
The IEEE Transactions on Semiconductor Manufacturing is a quarterly peer-reviewed scientific journal published by the IEEE Computer Society. It covers research on semiconductor device fabrication, including simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, and manufacturability improvement. The editor-in-chief is Anthony Muscat (University of Arizona). According to the Journal Citation Reports, the journal has a 2013 impact factor of 0.977.
The journal is a joint publication of the
References
IEEE Transactions on Semiconductor Manufacturing Wikipedia(Text) CC BY-SA