Hexafluoroacetylacetone

Hexafluoroacetylacetone is the chemical compound with the formula CF₃C(O)CH₂C(O)CF₃ (often abbreviated as hfac). This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac⁻, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.

This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone. It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.

Being highly electrophilic, hfac hydrates in water to give the tetraol.